Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/28/2003
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Application #:
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10105266
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Filing Dt:
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03/26/2002
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Inventors:
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Ming-Chung Liang, Shin-Yi Tsai
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Title:
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FABRICATION METHOD FOR FORMING ROUNDED CORNER OF CONTACT WINDOW AND VIA BY TWO-STEP LIGHT ETCHING TECHNIQUE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| NO. 16, LI-HSIN RD. |
| HSINCHU, TAIWAN R.O.C |
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| ROSENBERG, KLEIN & LEE |
| MORTON J. ROSENBERG |
| 3458 ELLICOTT CENTER DRIVE, STE. 101 |
| ELLICOTT CITY, MD 21043 |
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