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Patent Assignment Abstract of Title

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Total Assignments: 3

Patent #:	6522392	Issue Dt:	02/18/2003	Application #:	09721452	Filing Dt:	11/22/2000
Inventors:	Werner Muller-Rissmann, Hubert Holderer, Rudolf Von Bunau, Christian Wagner et al
Title:	OPTICAL SYSTEMS AND METHODS OF COMPENSATING ROTATIONALLY NON-SYMMETRICAL IMAGE DEFECTS IN AN OPTICAL SYSTEM

Assignment: 1

Reel/Frame:

011517/0859

Recorded: 02/12/2001

Pages: 5

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

MULLER-RISSMANN, WERNER

Exec Dt:

12/06/2000

HOLDERE, HUBERT

Exec Dt:

12/01/2000

VON BUNAU, RODOLF

Exec Dt:

12/04/2000

WAGNER, CHRISTIAN

Exec Dt:

12/06/2000

BECKER, JOCHEN

Exec Dt:

11/23/2000

XALTER, STEFAN

Exec Dt:

11/23/2000

HUMMEL, WOLFGANG

Exec Dt:

12/01/2000

Assignee:

CARL-ZEISS-STIFTUNG (TRADING AS CARL ZEISS)

D-89518, GERMANY

Correspondent:

FACTOR & PARTNERS, LLC

JOVAN N. JOVANOVIC

1327 W. WASHINGTON BLVD.

SUITE G/H

CHICAGO, IL 60607

Assignment: 2

Reel/Frame:

016328/0108

Recorded: 07/29/2005

Pages: 8

Conveyance:

CORRECTIVE ASSIGNMENT TO CORRECT THE SERIAL NUMBER OF PROPERTY NUMBER 7 PREVIOUSLY RECORDED ON REEL 014845 FRAME 0455. ASSIGNOR(S) HEREBY CONFIRMS THE SERIAL NUMBER 09/899,332 SHOULD READ 09/721,452.

Assignor:

CARL-ZEISS STIFTUNG (TRADING AS CARL-ZEISS)

Exec Dt:

06/30/2004

Assignee:

CARL-ZEISS SMT AG

CARL-ZEISS-STRASSE 22

OBERKOCHEN, GERMANY 73447

Correspondent:

JOSEPH M. KINSELLA JR.

1327 W. WASHINGTON BVLD., SUITE 5G/H

CHIGAGO, IL 60607

Assignment: 3

Reel/Frame:

018109/0059

Recorded: 07/19/2006

Pages: 3

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignor:

LABUS, RAINER

Exec Dt:

06/21/2006

Assignee:

CARL-ZEISS SMT AG

CARL-ZEISS-STRASSE 22

OBERKOCHEN, GERMANY 73447

Correspondent:

MICHEAL D. LAKE

FACTOR & LAKE, LTD.

1327 W. WASHINGTON BLVD., SUITE 5G/H

CHICAGO, IL 60607

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