Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/11/2003
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Application #:
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09998692
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Filing Dt:
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12/03/2001
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Publication #:
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Pub Dt:
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11/28/2002
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Inventors:
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Yasuhiro Asaoka, Hiroshi Tanaka, Naoki Yokoi, Seiji Muranaka, Toshihiko Nagai
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Title:
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METHOD AND APPARATUS FOR CLEANING SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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2-3, MARUNOUCHI 2-CHOME |
CHIYODA-KU, TOKYO, JAPAN 100-8 |
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1006, OAZA KADOMA, KADOMA-SHI |
OSAKA 571-8501, JAPAN |
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MCDERMOTT, WILL & EMERY |
STEPHEN A. BECKER |
600 13TH STREET, N.W. |
WASHINGTON, DC 20005 |
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