Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/25/2003
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Application #:
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09911654
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Filing Dt:
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07/24/2001
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Publication #:
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Pub Dt:
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01/30/2003
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Inventor:
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John Drewery
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Title:
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RF BIAS CONTROL IN PLASMA DEPOSITION AND ETCH SYSTEMS WITH MULTIPLE RF POWER SOURCES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME |
| TBS BROADCAST CENTER |
| MINATO-KU, TOKYO 107, JAPAN |
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| WOOD, HERRON & EVANS, LLP |
| C. RICHARD EBY, ESQ. |
| 2700 CAREW TOWER |
| CINCINNATI, OH 45202 |
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