Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/01/2003
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Application #:
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09567001
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Filing Dt:
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05/09/2000
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Inventors:
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Hajime Kawano, Haruo Yoda
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Title:
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ELECTRON BEAM EXPOSURE SYSTEM AND EXPOSING METHOD USING AN ELECTRON BEAM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6, KANDA SURUGADAI 4-CHOME CHIYODA-KU |
| TOKYO 101-8010, JAPAN |
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| KENYON & KENYON |
| JOHN C. ALTMILLER |
| 1500 K STREET, N.W., SUITE 700 |
| WASHINGTON, DC 20005 |
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