Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/08/2003
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Application #:
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09635848
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Filing Dt:
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08/11/2000
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Inventors:
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Hiroshi Tomita, Soichi Nadahara, Mitsuhiko Shirakashi, Kenya Ito, Yuki Inoue
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Title:
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APPARATUS AND METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 11-1, HANEDA ASAHI-CHO, OHTA-KU |
| TOKYO, JAPAN |
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| WENDEROTH LIND & PONACK, L.L.P. |
| ATTN: NILS E. PEDERSEN, ESQ. |
| 2033 K STREET, N.W., SUITE 800 |
| WASHINGTON, D.C. 20006 |
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