Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/08/2003
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Application #:
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09612667
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Filing Dt:
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07/10/2000
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Inventors:
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Douglas S. Olsen, David Stura
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Title:
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APPARATUS AND METHOD FOR CONTROLLING TEMPERATURE IN A WAFER USING INTEGRATED TEMPERATURE SENSITIVE DIODE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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55 CHAPEL STREET |
NEWTON, MASSACHUSETTS 02158 |
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SAMUELS, GAUTHIER & STEVENS, LLP |
STEVEN M. MILLS, ESQ. |
225 FRANKLIN STREET |
SUITE 3300 |
BOSTON, MA 02110 |
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