Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/15/2003
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Application #:
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10151492
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Filing Dt:
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05/20/2002
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Inventor:
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Julian Hodos
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Title:
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CLAMPING OF A SEMICONDUCTOR SUBSTRATE FOR GAS-ASSISTED HEAT TRANSFER IN A VACUUM CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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100 SUNNYSIDE BLVD. |
WOODBURY, NEW YORK 11797 |
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WOOD, HERRON & EVANS, L.L.P. |
JOSEPH R. JORDAN, ESQ. |
2700 CAREW TOWER |
CINCINNATI, OHIO 45202 |
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