Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/29/2003
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Application #:
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09689008
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Filing Dt:
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10/12/2000
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Inventors:
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Hank Prosack, Patrick H. Ferland, Kenneth Swan
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Title:
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HYBRID FUZZY CLOSED-LOOP SUB-MICRON CRITICAL DIMENSION CONTROL IN WAFER MANUFACTURING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| INTELLECTUAL PROPERTY GROUP PATENTS DEPARTMENT M/S D3-579 |
| 2900 SEMICONDUCTOR DRIVE |
| SANTA CLARA, CALIFORNIA 95051 |
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| STALLMAN & POLLOCK LLP |
| MICHAEL J. POLLOCK |
| TWO RINCON CENTER, SUITE 290 |
| SAN FRANCISCO, CA 94105 |
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