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Patent Assignment Abstract of Title

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Total Assignments: 1

Patent #:	6558506	Issue Dt:	05/06/2003	Application #:	09889582	Filing Dt:	10/24/2001
Inventors:	Richard J. Freeman, Jay R. Wallace, Yoichi Kurono, Tadashi Onishi et al
Title:	ETCHING SYSTEM AND ETCHING CHAMBER

Assignment: 1

Reel/Frame:

Recorded: 05/09/2002

Pages: 3

Conveyance:

ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Assignors:

Exec Dt:

09/06/2001

Exec Dt:

09/06/2001

Exec Dt:

09/25/2001

Exec Dt:

09/06/2001

Exec Dt:

09/26/2001

Exec Dt:

09/26/2001

Assignee:

INTELLECTUAL PROPERTY DEPARTMENT 3-6, AKASAKA 5-CHOME

TBS BROADCAST CENTER

MINATO-KU, TOKYO 107-8481, JAPAN

Correspondent:

OBLON, SPIVAK, MCCLELLAND, MAIER, ET AL.

STEVEN P. WEIHROUCH

FOURTH FLOOR 1755 JEFFERSON DAVIS HWY

ARLINGTON VIRGINIA 22202

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