Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/20/2003
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Application #:
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09844015
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Filing Dt:
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04/27/2001
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Publication #:
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Pub Dt:
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10/31/2002
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Inventor:
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Hung-Eil Kim
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Title:
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DARK FIELD TRENCH IN AN ALTERNATING PHASE SHIFT MASK TO AVOID PHASE CONFLICT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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1160 KERN AVENUE |
SUNNYVALE, CALIFORNIA 94088 |
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FOLEY & LARDNER |
PAUL S. HUNTER |
FIRSTAR CENTER |
777 EAST WISCONSIN AVENUE |
MILWAUKEE, WI 53202-5367 |
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