Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/03/2003
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Application #:
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10053333
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Filing Dt:
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01/18/2002
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Inventor:
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Sudipto R. Roy
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Title:
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SELF-SIPHONING CMP TOOL DESIGN FOR APPLICATIONS SUCH AS COPPER CMP AND LOW-K DIELECTRIC CMP
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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60 WOODLANDS INDUSTRIAL PARK D STREET 2 |
SINGAPORE, SINGAPORE 73840 |
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GEORGE O. SAILE |
20 MCINTOSH DRIVE |
POUGHKEEPSIE, NY 12603 |
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