Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/22/2003
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Application #:
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09815228
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Filing Dt:
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03/22/2001
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Publication #:
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Pub Dt:
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10/31/2002
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Inventors:
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Alex Klooster, James M. Marks, Takeo Sawatari
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Title:
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HOLOGRAPHIC SCATTEROMETER FOR DETECTION AND ANALYSIS OF WAFER SURFACE DEPOSITS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6105 GILBERT LAKE ROAD |
| BLOOMFIELD HILLS, MICHIGAN 48301 |
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| KEVIN G. MIERZWA |
| 28333 TELEGRAPH ROAD |
| SUITE 250 |
| SOUTHFIELD, MI 48034 |
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