Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/23/2003
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Application #:
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10283437
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Filing Dt:
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10/30/2002
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Inventors:
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Hsien-Tsong Chen, Ming-Shuo Yen, Woan Tyng Hwang, Shion-Feng Chang Chien, Yu-Chang Chen et al
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Title:
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OPTIMIZED MONITOR METHOD FOR A METAL PATTERNING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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121 PARK AVE. 3 |
SCIENCE-BASED INDUSTRIAL PARK |
HSIN-CHU, TAIWAN R.O.C. |
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GEORGE O. SAILE |
28 DAVIS AVENUE |
POUGHKEEPSIE, NY 12603 |
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