Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/14/2003
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Application #:
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09861623
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Filing Dt:
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05/22/2001
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Publication #:
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Pub Dt:
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11/28/2002
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Inventor:
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Ching-Yu Chang
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Title:
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METHOD OF ENHANCING PHOTORESIST ANTI-ETCHING ABILITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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SCIENCE-BASED INDUSTRIAL PARK |
NO. 16, LI-HSIN ROAD |
HSIN-CHU CITY, TAIWAN R.O.C |
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LOWE HAUPTMAN GILMAN & BERNER |
BENJAMIN J. HAUPTMAN |
1700 DIAGONAL ROAD, SUITE 310 |
ALEXANDRIA, VIRGINIA 22314 |
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