Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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10/28/2003
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Application #:
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09963382
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Filing Dt:
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09/27/2001
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Publication #:
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Pub Dt:
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03/28/2002
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Inventors:
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Tatsuhisa Matsunaga, Masahiro Teramoto, Norio Akutsu, Kouichi Noto
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Title:
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METHOD AND APPARATUS FOR PROCESSING SUBSTRATES AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
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Assignment:
1
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CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE'S NAME, PREVIOUSLY RECORDED AT REEL 0112207 FRAME 0784.
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| 2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8 |
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| LEYDIG, VOIT & MAYER, LTD. |
| JEFFREY A. WYAND |
| 700 13TH ST., N.W., SUITE 300 |
| WASHINGTON, DC 20005-3960 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-20, 3-CHOME |
| HIGASHI-NAKANO |
| NAKANO-KU, TOKYO 164-8511, JAPAN |
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| BACON & THOMAS, PLLC |
| EUGENE MAR |
| 625 SLATERS LANE FOURTH FLOOR |
| ALEXANDRIA, VA 22314 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO |
| CHIYODA-KU |
| TOKYO, JAPAN 101-0045 |
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| VOLPE & KOENIG, P.C. |
| 30 SOUTH 17TH STREET |
| SUITE 1800 |
| PHILADELPHIA, PA 19103 |
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