Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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09875625
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Filing Dt:
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06/06/2001
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Publication #:
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Pub Dt:
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12/20/2001
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Inventors:
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Sung Gyu Pyo, Si Bum Kim
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Title:
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METHOD OF CATALYZING COPPER DEPOSITION IN A DAMASCENE STRUCTURE BY PLASMA TREATING THE BARRIER LAYER AND THEN APPLYING A CATALYST SUCH AS IODINE OR IODINE COMPOUNDS TO THE BARRIER LAYER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| BUBAL-UEP, ICHON-SHI |
| SAN 136-1, AMI-RI |
| KYUNGKI-DO, KOREA, REPUBLIC OF |
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| MARSHALL, GERSTEIN & BORUN |
| JAMES A. FLIGHT |
| 6300 SEARS TOWER |
| 233 S. WACKER DRIVE |
| CHICAGO, IL 60606-6402 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SAN 136-1, AMI-RI BUBAL-UEP, ICHON-SHI |
| KYUNGKI-DO, KOREA, REPUBLIC OF |
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| MARSHALL, GERSTEIN & BORUN |
| JAMES A. FLIGHT |
| 6300 SEARS TOWER |
| 233 S. WACKER DRIVE |
| CHICAGO, ILLINOIS 60606-6402 |
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