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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
11/18/2003
Application #:
10172308
Filing Dt:
06/14/2002
Publication #:
Pub Dt:
01/30/2003
Inventors:
Chien-Hsin Lai, Cheng-Chi Hsieh, Jung-Nan Tseng, Huang-Yi Lin, Fu-Yang Yu
Title:
WAFER PRESSURE REGULATION SYSTEM FOR POLISHING MACHINE
Assignment: 1
Reel/Frame:
013017/0292Recorded: 06/14/2002Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/29/2002
Exec Dt:
05/29/2002
Exec Dt:
05/29/2002
Exec Dt:
05/29/2002
Exec Dt:
05/29/2002
Assignee:
SCIENCE-BASED INDUSTRIAL PARK
NO. 3, LI-HSIN RD. II,
HSINCHU, TAIWAN
Correspondent:
J.C. PATENTS, INC.
4 VENTURE,
SUITE 250
IRVINE, CA 92618

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