Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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12/02/2003
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Application #:
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09973760
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Filing Dt:
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10/11/2001
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Publication #:
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Pub Dt:
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04/17/2003
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Inventors:
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Yong-Il Kim, Won-Hyung Lee, Byung-Ha Cho
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Title:
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ATOMIC LAYER DEPOSITION APPARATUS AND PROCESS USING REMOTE PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-1 CHAAM-DONG, CHONAN-CITY |
| CHUNGCHONGNAM-DO, 330-200, KOREA, REPUBLIC OF |
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| ROBERT E. BUSHNELL |
| ATTORNEY AT LAW |
| SUITE 300, 1522 "K" STREET, NW |
| WASHINGTON, D.C. 20005 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| A CORPORATION OF KOREA |
| 5-1 CHAAM-DONG, CHONAN-CITY |
| CHUNGCHONGNAM-DO, 330-200, KOREA, REPUBLIC OF |
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| ROBERT E. BUSHNELL |
| ATTORNEY AT LAW |
| SUITE 300 |
| 1522 "K" STREET, N.W. |
| WASHINGTON, D.C. 20005 |
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