Patent Assignment Abstract of Title
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Total Assignments:
5
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Patent #:
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Issue Dt:
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12/09/2003
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Application #:
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09887808
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Filing Dt:
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06/22/2001
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Publication #:
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Pub Dt:
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12/27/2001
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Inventor:
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Donald W. Berrian
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Title:
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ION IMPLANTATION UNIFORMITY CORRECTION USING BEAM CURRENT CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 42B CHERRY HILL DRIVE |
| DANVERS, MASSACHUSETTS 01923 |
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| LATHROP & GAGE LC |
| CURTIS A. VOCK, ESQ |
| 4845 PEARL EAST CIRCLE |
| SUITE 302 |
| BOULDER, CO 80301 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 108 CHERRY HILL DRIVE |
| ATTN: PATENT LAW DEPARTMENT |
| BEVERLY, MASSACHUSETTS 01915 |
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| AXCELIS TECHNOLOGIES, INC. |
| DENIS A. ROBITAILLE |
| ATTN: PATENT LAW DEPARTMENT |
| 108 CHERRY HILL DRIVE |
| BEVERLY, MA 01915 |
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Assignment:
3
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| 3003 TASMAN DRIVE |
| SANTA CLARA, CALIFORNIA 95054 |
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| CHRISTOPHER E. KONDRACKI |
| 1501 WILSON BOULEVARD |
| SUITE 510 |
| ARLINGTON, VA 22209 |
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Assignment:
4
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SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3003 TASMAN DRIVE, HF 150 |
| SANTA CLARA, CALIFORNIA 95054 |
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| JAY DASILVA |
| 1025 VERMONT AVE NW, SUITE 1130 |
| COGENCY GLOBAL INC. |
| WASHINGTON, DC 20005 |
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Assignment:
5
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RELEASE BY SECURED PARTY (SEE DOCUMENT FOR DETAILS).
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| 108 CHERRY HILL DRIVE |
| BEVERLY, MASSACHUSETTS 01915 |
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| MINTZ LEVIN |
| ONE FINANCIAL CENTER |
| BOSTON, MA 02111 |
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