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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
6664546
Issue Dt:
12/16/2003
Application #:
09502554
Filing Dt:
02/10/2000
Inventors:
Mark A. McCord, Jan Lauber, Jun Pei, Jorge P. Fernandez
Title:
IN-SITU PROBE FOR OPTIMIZING ELECTRON BEAM INSPECTION AND METROLOGY BASED ON SURFACE POTENTIAL
Assignment: 1
Reel/Frame:
010879/0423Recorded: 06/26/2000Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
MCCORD, MARK A.
Exec Dt:
03/13/2000
LAUBER, JAN
Exec Dt:
03/13/2000
PEI, JUN
Exec Dt:
03/13/2000
FERNANDEZ, JORGE P.
Exec Dt:
03/13/2000
Assignee:
KLA-TENCOR
160 RIO ROBLES
SAN JOSE, CALIFORNIA 95134
Correspondent:
BEYER WEAVER & THOMAS, LLP
MARY R. OLYNICK
P.O. BOX 130
MOUNTAIN VIEW, CA 94042-0130
Assignment: 2
Reel/Frame:
011214/0814Recorded: 11/06/2000Pages: 3
Conveyance:
RE-REC0RD T0 CHANGE THE EXECUTION DATE FROM 03-13-00 TO 06-13-00 FOR ALL CONVEYING PARTIES, PREVIOUSLY RECORDED ON REEL 010879 FRAME 0423, ASSIGNOR CONFIRMS THE ASSIGNMENT OF THE ENTIRE INTEREST.
Assignors:
MCCORD, MARK A.
Exec Dt:
06/13/2000
LAUBER, JAN
Exec Dt:
06/13/2000
PEI, JUN
Exec Dt:
06/13/2000
FERNANDEZ, JORGE P.
Exec Dt:
06/13/2000
Assignee:
KLA-TENCOR
160 RIO ROBLES
SAN JOSE, CALIFORNIA 95134
Correspondent:
BEYER WEAVER & THOMAS, LLP
MARY R. OLYNICK
P.O. BOX 778
BERKELEY, CA 94704-0778

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