Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/30/2003
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Application #:
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09796591
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Filing Dt:
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03/02/2001
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Publication #:
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Pub Dt:
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09/06/2001
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Inventor:
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Nobuo Ishii
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Title:
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PLASMA PROCESSING APPARATUS WITH ANNULAR WAVEGUIDE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO-TO, JAPAN |
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| 5-107, SUDOME, KOHATA, UJI-SHI |
| KYOTO-FU, JAPAN |
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| 1-1-I-312, OGURA, SAIWAI-KU |
| KAWASAKI-SHI, KANAGAWA-KEN, JAPAN |
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| FINNEGAN, HENDERSON, FARABOW, ET AL. |
| ERNEST F. CHAPMAN |
| 1300 I STREET, NW. |
| WASHINGTON, DC 20005-3315 |
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