Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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02/03/2004
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Application #:
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10134729
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Filing Dt:
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04/30/2002
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Publication #:
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Pub Dt:
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11/28/2002
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Inventors:
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Jin-Man Kim, Yun-Sik Yang, Sang-Jun Chun, Young-Min Min
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Title:
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METHOD OF AND AN APPARATUS FOR REGULATING THE TEMPERATURE OF AN ELECTROSTATIC CHUCK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PALDAL-GU |
| 416 MAETAN-DONG |
| SUWON-CITY, KYUNGKI-DO, KOREA, REPUBLIC OF |
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| VOLENTINE FRANCOS, PLLC |
| ADAM C. VOLENTINE |
| 12200 SUNRISE VALLEY DRIVE |
| SUITE 150 |
| RESTON, VA 20191 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU |
| CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF |
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| JOHN A. CASTELLANO |
| 11730 PLAZA AMERICA DR., SUITE 600 |
| HARNESS, DICKEY & PIERCE, P.L.C. |
| RESTON, VA 20190 |
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