Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/24/2004
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Application #:
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10198394
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Filing Dt:
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07/17/2002
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Publication #:
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Pub Dt:
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01/23/2003
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Inventors:
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Yasuhiro Yoshitake, Shunichi Matsumoto, Toshiharu Miwa
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Title:
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OVERLAY INSPECTION APPARATUS FOR SEMICONDUCTOR AND METHOD THEREOF
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CHIYODA-KU |
| 6, KANDA SURUGADAI 4-CHOME |
| TOKYO, JAPAN |
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| TOWNSEND AND TOWNSEND AND CREW LLP |
| ROBERT C. COLWELL |
| TWO EMBARCADERO CENTER, 8TH FLOOR |
| SAN FRANCISCO, CA 94111-3834 |
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