Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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03/09/2004
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Application #:
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10151425
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Filing Dt:
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05/20/2002
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Publication #:
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Pub Dt:
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11/20/2003
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Inventors:
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Leonid E. Reyzelman, John E. Sortor
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Title:
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METHOD AND APPARATUS FOR VHF PLASMA PROCESSING WITH LOAD MISMATCH RELIABILITY AND STABILITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 100 HIGHPOWER ROAD |
| ROCHESTER, NEW YORK 14623 |
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| HARNESS, DICKEY & PIERCE, P.L.C. |
| ALAN L. CASSEL |
| 5445 CORPORATE DRIVE |
| SUITE 400 |
| TROY, MICHIGAN 48098-2683 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| 90 INDUSTRIAL WAY |
| WILMINGTON, MASSACHUSETTS 01887-4610 |
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| JOSEPH M. LAFATA |
| PO BOX 828 |
| BLOOMFIELD HILLS, MI 48303 |
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