Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/23/2004
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Application #:
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09871224
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Filing Dt:
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05/31/2001
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Publication #:
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Pub Dt:
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04/25/2002
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Inventors:
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Klaus Breitschwerdt, Volker Becker, Franz Laermer, Andrea Schilp
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Title:
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DEVICE AND METHOD FOR ETCHING A SUBSTRATE BY USING AN INDUCTIVELY COUPLED PLASMA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| POSTFACH 30 02 20 |
| D-70442 STUTTGART, GERMANY |
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| KENYON & KENYON |
| RICHARD L. MAYER |
| ONE BROADWAY |
| NEW YORK, NY 10004 |
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