Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/06/2004
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Application #:
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09906517
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Filing Dt:
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07/16/2001
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Inventors:
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Marilyn I. Wright, Kevin R. Lensing, James Broc Stirton, Richard J. Markle
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Title:
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METHOD AND APPARATUS FOR PERFORMING OVERLAY MEASUREMENTS USING SCATTEROMETRY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5204 E. BEN WHITE BLVD. |
| AUSTIN, TEXAS 78741 |
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| WILLIAMS MORGAN & AMERSON, P.C. |
| J. MIKE AMERSON |
| 7676 HILLMONT, SUITE 250 |
| HOUSTON, TEXAS 77040 |
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