Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/27/2004
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Application #:
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10133535
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Filing Dt:
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04/26/2002
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Publication #:
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Pub Dt:
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12/05/2002
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Inventors:
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Ryuichi Kyomasu, Hiroto Urabayashi, Minoru Torihata, Kuniyuki Takahashi et al
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Title:
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XY TABLE FOR A SEMICONDUCTOR MANUFACTURING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-51-1, INADAIRA |
| MUSASHI MURAYAMA-SHI |
| TOKYO,, JAPAN |
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| KODA & ANDROLIA |
| WILLIAM L. ANDROLIA |
| 2029 CENTURY PARK EAST |
| SUITE 3850 |
| LOS ANGELES, CA 90067-3024 |
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