Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/27/2004
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Application #:
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10146915
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Filing Dt:
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05/17/2002
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Publication #:
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Pub Dt:
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12/19/2002
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Inventors:
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Toralf Gruner, Manfred Maul, Rudolf Von Buenau
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Title:
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MICROLITHOGRAPHIC ILLUMINATION METHOD AND A PROJECTION LENS FOR CARRYING OUT THE METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STRASSE 22 |
| 73447 OBERKOCHEN, GERMANY |
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| SUGHRUE MION, PLLC |
| GEORGE F. LEHNIGK |
| 2100 PENNSYLVANIA AVENUE, NW. |
| STE. 800 |
| WASHINGTON, DC 200037-3213 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STRASSE 22 |
| 73447 OBERKOCHEN, GERMANY |
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| SUGHRUE MION, PLLC |
| 2100 PENNSYLVANIA AVENUE, N.W. |
| SUITE 800 |
| WASHINGTON, DC 20037 |
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