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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
6734020
Issue Dt:
05/11/2004
Application #:
09800881
Filing Dt:
03/07/2001
Publication #:
20020127745
Pub Dt:
09/12/2002
Inventors:
Siqing Lu, Yu Chang, Dongxi Sun, Vinh Dang, Michael X. Yang, Anzhong Andrew Chang et al
Title:
VALVE CONTROL SYSTEM FOR ATOMIC LAYER DEPOSITION CHAMBER
Assignment: 1
Reel/Frame:
012715/0813Recorded: 05/20/2002Pages: 25
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
LU, SIQING
Exec Dt:
05/07/2001
CHANG, YU
Exec Dt:
05/07/2001
SUN, DONGXI
Exec Dt:
05/07/2001
DANG, VINH
Exec Dt:
05/10/2001
YANG, MICHAEL X.
Exec Dt:
05/07/2001
CHANG, ANZHONG ANDREW
Exec Dt:
05/11/2001
NGUYEM, ANH N.
Exec Dt:
05/08/2001
XI, MING
Exec Dt:
05/09/2001
Assignee:
APPLIED MATERIALS, INC.
LEGAL AFFAIRS DEPARTMENT - M/S 2061
3050 BOWERS AVE.
SANTA CLARA, CALIFORNIA 95054
Correspondent:
APPLIED MATERIALS, INC.
ROBERT W. MULCAHY
P.O. BOX 450A
LEGAL AFFAIRS DEPARTMENT - M/S 2061
SANTA CLARA, CA 95052

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