Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/01/2004
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Application #:
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10157664
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Filing Dt:
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05/29/2002
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Publication #:
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Pub Dt:
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12/04/2003
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Inventors:
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William Leavitt, Christopher Berry, Thomas Doyon, David Sabo
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Title:
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WAFER HEATING DEVICES FOR USE IN ION IMPLANTATION SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 32A CHERRY HILL DRIVE |
| DANVERS, MASSACHUSETTS 01923 |
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| NUTTER MCCLENNEN & FISH LLP |
| THOMAS J. ENGELLENNER |
| 155 SEAPORT BOULEVARD |
| WORLD TRADE CENTER |
| BOSTON, MA 02210-2604 |
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