Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/15/2004
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Application #:
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09978546
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Filing Dt:
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10/18/2001
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Publication #:
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Pub Dt:
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05/01/2003
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Inventors:
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Henry Wei-Ming Chung, Shin-Yi Tsai, Ming-Chung Liang
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Title:
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METHOD FOR REDUCING DIMENSIONS BETWEEN PATTERNS ON A PHOTORESIST
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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SCIENCE-BASED INDUSTRIAL PARK |
NO. 16, LI-HSIN ROAD |
HSINCHU, TAIWAN R.O.C |
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FINNEGAN, HENDERSON, FARABOW ET AL |
YITAI HU |
1300 I STREET, N.W., STE. 700 |
WASHINGTON, D.C. 20005-3315 |
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