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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/20/2004
Application #:
10069512
Filing Dt:
03/04/2002
Inventors:
Tomomi Yamasaki, Hidetoshi Kimura, Junichi Arami, Hiroo Ono, Akira Koshiishi, Koji Miyata
Title:
MAGNETRON PLASMA PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
012894/0695Recorded: 03/04/2002Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/14/2002
Exec Dt:
02/15/2002
Exec Dt:
02/19/2002
Exec Dt:
02/15/2002
Exec Dt:
02/15/2002
Exec Dt:
02/18/2002
Assignees:
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO 107-8481, JAPAN
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU
TOKYO 100-0004, JAPAN
Correspondent:
OBLON SPIVAK MCCLELLAND MAIER & NEUSTADT
SURINDER SACHAR
1755 JEFFERSON DAVIS HIGHWAY, 4TH FLOOR
ARLINGTON, VA 22202

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