Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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10175702
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Filing Dt:
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06/20/2002
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Publication #:
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Pub Dt:
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12/25/2003
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Inventors:
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Ching Shan Lu, Fu-Su Lee, Wei-Ming You, Yu-Chien Hsiao, Jih-Churng Twu
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Title:
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METROLOGY FOR MONITORING A RAPID THERMAL ANNEALING PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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SCIENCE-BASED INDUSTRIAL PARK |
NO. 121 PARK AVENUE 3 |
HSIN-CHU, TAIWAN R.O.C |
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TUNG & ASSOCIATES |
RANDY W. TUNG |
838 W. LONG LAKE ROAD, SUITE 120 |
BLOOMFIELD HILLS, MI 48302 |
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