Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/28/2004
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Application #:
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10184735
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Filing Dt:
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06/28/2002
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Inventors:
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Chen-Nan Yeh, Li-Te S. Lin, Li-Chih Chao, Tsang Jiuh-Wu
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Title:
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PARTIAL VIA HARD MASK OPEN ON LOW-K DUAL DAMASCENE ETCH WITH DUAL HARD MASK (DHM) APPROACH
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE-BASED INDUSTRIAL PARK |
| 121 PARK AVE. 3 |
| HSIN-CHU, TAIWAN R.O.C |
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| GEORGE O. SAILE |
| 20 MCINTOSH DRIVE |
| POUGHKEEPSIE, NY 12603 |
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