Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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10/05/2004
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Application #:
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10138864
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Filing Dt:
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05/03/2002
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Publication #:
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Pub Dt:
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03/27/2003
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Inventors:
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Hiroyuki Inomata, Osamu Katada, Masa-Aki Kurihara, Takeshi Ohfuji, Shiho Sasaki et al
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Title:
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POST EXPOSURE MODIFICATION OF CRITICAL DIMENSIONS IN MASK FABRICATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2200 MISSION COLLEGE BOULEVARD |
| SANTA CLARA, CALIFORNIA 95052 |
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| 1-1, ICHIGAYA-KAGACHO 1-CHOME |
| SHINJUKU-KU, TOKYO, JAPAN 162-8 |
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| 110-1 SHIMOASAO, KAWASAKI |
| ASAO-KU, KANAGAWA, JAPAN 215-0 |
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| BLAKELY, SOKOLOFF, TAYLOR & ZAFMAN LLP |
| BRENT E. VECCHIA |
| 12400 WILSHIRE BOULEVARD |
| 7TH FLOOR |
| LOS ANGELES, CA 90025 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON & SHERIDAN, LLP |
| 24 GREENWAY PLAZA |
| SUITE 1600 |
| HOUSTON, TX 77046 |
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