Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/09/2004
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Application #:
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09424660
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Filing Dt:
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01/27/1999
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Publication #:
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Pub Dt:
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12/20/2001
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Inventors:
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EDGAR RUETH, REINHARD GERIGK, EGGO SICHMANN, WOLFGANG BECKER
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Title:
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METHOD AND DEVICE FOR CONTROLLING THICKNESS DURING SPIN COATING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| JUNKERSSTRASSE 1 |
| D-63755, ALZENAU, GERMANY |
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| PILLSBURY MADISON & SUTRO LLP |
| JAY M. FINKELSTEIN |
| INTELLECTUAL PROPERTY GROUP |
| 1100 NEW YORK AVENUE, NW, NINTH FLOOR |
| WASHINGTON, DC 20005-3918 |
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