Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/08/2005
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Application #:
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09855972
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Filing Dt:
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05/15/2001
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Publication #:
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Pub Dt:
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10/18/2001
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Inventors:
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Kevin P. Martin, Harry P. Gillis, Dmitri A. Choutov
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Title:
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METHOD AND APPARATUS FOR LOW ENERGY ELECTRON ENHANCED ETCHING OF SUBSTRATES IN AN AC OR DC PLASMA ENVIRONMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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CENTENNIAL RESEARCH BUILDING |
400 TENTH STREET |
ATLANTA, GEORGIA 30332 |
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THOMAS, KAYDEN, HORSTEMEYER & RISLEY, LL |
SCOTT A. HORSTEMEYER |
100 GALLERIA PARKWAY, SUITE 1750 |
ATLANTA, GEORGIA 30339-5948 |
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