Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/22/2005
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Application #:
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09563963
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Filing Dt:
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05/03/2000
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Inventors:
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Sheng Sun, Jeff C. Olsen, Sanjay Yandav, Quanyuan Shang, Kam S. Law
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Title:
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MULTIPLE FREQUENCY PLASMA CHAMBER WITH GROUNDING CAPACITOR AT CATHODE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| M/S 2061 |
| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| APPLIED MATERIALS, INC |
| ROBERT W. MULCAHY |
| P.O. BOX 450-A |
| PATENT COUNSEL, M/S 2061 |
| SANTA CLARA, CA 95052 |
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