Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/29/2005
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Application #:
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10003908
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Filing Dt:
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11/01/2001
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Inventors:
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William R. Entley, John G. Langan, Randy Hall
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Title:
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IN SITU PLASMA PROCESS TO REMOVE FLUORINE RESIDUES FROM THE INTERIOR SURFACES OF A CVD REACTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| SKJERVEN MORRILL MACPHERSON LLP |
| DAVID E. STEUBER |
| 25 METRO DRIVE, SUITE 700 |
| SAN JOSE, CA 95110 |
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