Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/05/2005
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Application #:
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10086497
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Filing Dt:
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02/28/2002
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Publication #:
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Pub Dt:
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05/29/2003
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Inventors:
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Geun-Young Yeom, Min-Jae Chung, Do-Haing Lee, Sung-Min Cho, Sae-Hoon Chung
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Title:
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LAYER-BY-LAYER ETCHING APPARATUS USING NEUTRAL BEAM AND ETCHING METHOD USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 53, MYUNGRYUNDONG 3-GA, JONGRO-GU |
| SEOUL 110-745, KOREA, REPUBLIC OF |
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| CANTOR COLBURN LLP |
| DANIEL F. DREXLER |
| 55 GRIFFIN ROAD SOUTH |
| BLOOMFIELD, CT 06002 |
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