Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/21/2005
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Application #:
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10331479
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Filing Dt:
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12/31/2002
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Publication #:
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Pub Dt:
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04/15/2004
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Inventors:
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Chih-Yung Huang, Ting-Wei Huang, Ching-Sung Hsiao
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Title:
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MICROWAVE PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 195 CHUNG HSING ROAD, SEC. 4 |
| CHUTUNG, |
| HSINCHU, TAIWAN R.O.C. |
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| RABIN & BER4DO, P.C. |
| STEVEN M. RABIN |
| 1101 14TH STREET, N.W. |
| SUITE 500 |
| WASHINGTON, DC 20005 |
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