Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/05/2005
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Application #:
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10291763
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Filing Dt:
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11/12/2002
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Publication #:
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Pub Dt:
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07/03/2003
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Inventors:
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Eric J. Strang, Thomas F.A. Bibby JR., Wayne L. Johnson
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Title:
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METHOD OF ADJUSTING THE THICKNESS OF AN ELECTRODE IN A PLASMA PROCESSING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107,, JAPAN |
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| PILLSBURY WINTHROP LLP |
| INTELLECTUAL PROPERTY GROUP |
| P.O. BOX 10500 |
| MCLEAN, VA 22102 |
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