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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
07/05/2005
Application #:
10334177
Filing Dt:
12/28/2002
Publication #:
Pub Dt:
07/01/2004
Inventors:
Pei-Yang Yan, Hsing-Chien Ma, Scott R. Chegwidden
Title:
DOUBLE-METAL EUV MASK ABSORBER
Assignment: 1
Reel/Frame:
013642/0495Recorded: 12/28/2002Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
12/10/2002
Exec Dt:
12/10/2002
Exec Dt:
12/10/2002
Assignee:
2200 MISSION COLLEGE BLVD.
SANTA CLARA, CALIFORNIA 94539
Correspondent:
DAVID C. LUNDMARK
P.O. BOX 5326
SC4-202
SANTA CLARA, CA 95056-5326

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