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Patent Assignment Abstract of Title
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Total Assignments: 6
Patent #:
6913796
Issue Dt:
07/05/2005
Application #:
09952649
Filing Dt:
09/14/2001
Publication #:
20020106500
Pub Dt:
08/08/2002
Inventors:
Ralph Albano, Cory Bargeron, Ivan L. Berry III, Jeff Bremmer, Phil Dembowski et al
Title:
PLASMA CURING PROCESS FOR POROUS LOW-K MATERIALS
Assignment: 1
Reel/Frame:
012518/0547Recorded: 01/18/2002Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
BARGERON, CORY
Exec Dt:
10/30/2001
BREMMER, JEFF
Exec Dt:
11/19/2001
DEMBOWSKI, PHIL
Exec Dt:
11/14/2001
Assignee:
DOW CORNING CORPORATION
MIDLAND, MICHIGAN
Correspondent:
KILLWORTH, GOTTMAN, HAGAN ET AL
BRIAN L. SMILER
ONE DAYTON SQUARE
ONE SOUTH MAIN STREET, SUITE 500
DAYTON, OH 45402
Assignment: 2
Reel/Frame:
012718/0575Recorded: 03/18/2002Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
ALBANO, RALPH
Exec Dt:
11/07/2001
BERRY, IVAN L. III
Exec Dt:
11/07/2001
ESCORCIA, ORLANDO
Exec Dt:
11/07/2001
HAN, QINGYUAN
Exec Dt:
11/07/2001
WALDFRIED, CARLO
Exec Dt:
11/07/2001
Assignee:
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE
BEVERLY, MASSACHUSETTS 01915
Correspondent:
KILLWORTH, GOTTMAN, HAGAN & SCHAEFF, LLP
BRIAN L. SMILER
ONE DAYTON CENTRE
ONE SOUTH MAIN STREET, SUITE 500
DAYTON, OH 45402
Assignment: 3
Reel/Frame:
012981/0684Recorded: 06/11/2002Pages: 6
Conveyance:
CORRECTED RECORDATION FORM COVER SHEET TO ADD INVENTOR'S NAME, PREVIOUSLY RECORDED AT REEL/FRAME 012718/0575 (ASSIGNMENT OF ASSIGNOR'S INTEREST)
Assignors:
ALBANO, RALPH
Exec Dt:
11/07/2001
BERRY, III IVAN L.
Exec Dt:
11/07/2001
ESCORCIA, ORLANDO
Exec Dt:
11/07/2001
HAN, QINGYUAN
Exec Dt:
11/07/2001
SBROCKEY, NICK
Exec Dt:
11/07/2001
WALDFRIED, CARLO
Exec Dt:
11/07/2001
Assignee:
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE
BEVERLY, MASSACHUSETTS 01915
Correspondent:
KILLWORTH, GOTTMAN, HAGAN & SCHAEFF, LLP
BRIAN L. SMILER
ONE DAYTON CENTRE
ONE SOUTH MAIN STREET, SUITE 500
DAYTON, OH 45402
Assignment: 4
Reel/Frame:
015204/0019Recorded: 09/30/2004Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
DOW CORNING CORPORATION
Exec Dt:
09/09/2004
Assignee:
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE
BEVERLY, MASSACHUSETTS 60025
Correspondent:
DINSMORE & SHOHL LLP
ONE DAYTON CENTRE, ONE SOUTH MAIN STREET
SUITE 1300
DAYTON, OH 45402
Assignment: 5
Reel/Frame:
016024/0585Recorded: 05/17/2005Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
AXCELIS TECHNOLOGIES, INC.
Exec Dt:
05/12/2005
Assignee:
DOW CORNING CORPORATION
P.O. BOX 994
MIDLAND, MICHIGAN 48686
Correspondent:
DINSMORE & SHOHL LLP
ONE DAYTON CENTRE, ONE SOUTH MAIN STREET
SUITE 1300
DAYTON, OH 45402
Assignment: 6
Reel/Frame:
020986/0143Recorded: 05/09/2008Pages: 36
Conveyance:
SECURITY AGREEMENT
Assignor:
AXCELIS TECHNOLOGIES, INC.
Exec Dt:
04/23/2008
Assignee:
SILICON VALLEY BANK
3003 TASMAN DRIVE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
CHRISTOPHER E. KONDRACKI
2001 JEFFERSON DAVIS, HWY., SUITE 1007
ARLINGTON, VA 22202

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