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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/09/2005
Application #:
10197048
Filing Dt:
07/17/2002
Inventors:
Yao-Hwan Kao, Hsun-Peng Lin, Wen-Hwo Liu, Yuan-Ting Huang
Title:
DISTRIBUTION MANIFOLD FOR EXHAUSTING PHOTORESIST VAPORS
Assignment: 1
Reel/Frame:
013129/0317Recorded: 07/17/2002Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/10/2002
Exec Dt:
05/10/2002
Exec Dt:
05/10/2002
Exec Dt:
05/10/2002
Assignee:
SCIENCE-BASED INDUSTRIAL PARK
121 PARK AVE. 3
HSIN-CHU, TAIWAN R.O.C
Correspondent:
GEOERGE O. SAILE
STEPHEN B. ACKERMAN
20 MCINTOSH DRIVE
POUGHKEEPSIE, NY 12603

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