Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/23/2005
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Application #:
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10757682
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Filing Dt:
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01/13/2004
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Publication #:
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Pub Dt:
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09/09/2004
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Inventors:
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Takahiro Iriyama, Yoshihiro Yamaguchi, Tetsuya Kabata
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Title:
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PLASMA PROCESSING APPARATUS FOR MONITORING AND STORING LIFETIME USAGE DATA OF A PLURALITY OF INTERCHANGEABLE PARTS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 2-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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| FRISHAUF, HOLTZ, GOODMAN & CHICK, P.C. |
| BARBARA VILLANI |
| 767 THIRD AVENUE, 25TH FLOOR |
| NEW YORK, NY 10017-2023 |
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