Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/20/2005
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Application #:
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10006964
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Filing Dt:
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12/05/2001
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Publication #:
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Pub Dt:
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07/25/2002
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Inventors:
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Timothy R. Spooner, Kieran P. Harney, David S. Courage, John R. Martin
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Title:
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METHOD AND DEVICE FOR PROTECTING MICRO ELECTROMECHANICAL SYSTEMS STRUCTURES DURING DICING OF A WAFER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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ONE TECHNOLOGY WAY |
NORWOOD, MASSACHUSETTS 02062 |
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SAMUELS, GAUTHIER & STEVENS LLP |
MATTHEW E. CONNORS |
225 FRANKLIN STREET, SUITE 3300 |
BOSTON, MASSACHUSETTS 02110 |
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