Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/29/2005
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Application #:
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09852111
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Filing Dt:
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05/09/2001
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Publication #:
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Pub Dt:
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11/22/2001
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Inventors:
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Seiichi Hayashi, Jimpei Harada, Tetsuo Kikuchi, Kazuhiko Omote, Katsuhiko Inaba
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Title:
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METHOD AND APPARATUS FOR MEASURING THIN FILM, AND THIN FILM DEPOSITION SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-9-12, MATSUBARA-CHO, AKISHIMA-SHI |
| TOKYO 196-8666, JAPAN |
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| JORDAN AND HAMBURG LLP |
| C. BRUCE HAMBURG, ESQ. |
| CHANIN BUILDING |
| SUITE 4000 122 EAST 42ND STREET |
| NEW YORK, NEW YORK 10168 |
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