Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/06/2005
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Application #:
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10984256
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Filing Dt:
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11/09/2004
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Publication #:
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Pub Dt:
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04/21/2005
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Inventors:
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Karl-Heinz Schuster, Christian Wagner, Martin Schriever
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Title:
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PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY AND METHOD FOR GENERATING MICROLITHOGRAPHIC IMAGES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CARL-ZEISS-STRASSE 22 |
| OBERKOCHEN, GERMANY 73447 |
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| SEAN P. DALEY |
| FISH & RICHARDSON P.C. |
| 225 FRANKLIN STREET |
| BOSTON, MA 02110-2804 |
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